SoW : Sensor on Wafer
Capella Series
[ T / C / P ]

Our Sensor Wafer (Capella Series) is used to verify the process conditions in the etching process, which is the core of the semiconductor process, and is also used in applications such as performance evaluation of etching equipment. Our sensor wafer has a size and weight similar to that of the production wafer, and is loaded into the etching equipment to monitor the temperature and plasma environment of the ESC and chamber in real time, and the result is digitized and schematized so that the operator can intuitively check the conditions. We are designed to be applicable to various test conditions from high temperature to cryogenic temperature, and are used as essential process equipment for etching equipment by providing accurate measurements for a stable test environment and actual production. In addition, we are increasing the demand and satisfaction of customers through cooperation with various equipment manufacturers.